Imitation of Song Dynasty "2024 Vacuum Technology Innovation and Development Forum and Shanghai Vacuum Society Academic Annual Meeting" was successfully held in the Tsung-Dao Lee Lecture Hall of Shanghai Jiao Tong University. The 9th Standing Council and Party Working Group Meeting of the 9th Council/the 4th Council of the 9th Council/the 5th Shanghai Vacuum Science and Technology Progress Award Ceremony were held at the same time.
Conference Opening
This annual meeting isSponsored by Shanghai Vacuum Society, organized by National Key Laboratory of Micron and Nano Processing Technology, Department of Micro-Nano Electronics, Shanghai Jiao Tong University, School of Integrated Circuits, Shanghai Jiao Tong University, and co-organized by School of Physics and Electronic Science, East China Normal University, Afaco Vacuum Technology (Suzhou) Co., Ltd., Institute of Composite Materials, School of Materials, Shanghai Jiao Tong University, and other institutions. Nearly 200 experts, scholars and technicians from the society's directors, supervisors, group member units and vacuum peers from other provinces and cities attended the conference.
The conference was hosted by Sun Zhuo, Chairman of the Shanghai Vacuum Society, and Guo Xiaojun, Executive Vice President of the School of Integrated Circuits of Shanghai Jiao Tong University, delivered a speech at the conference. Executive Vice President Guo Xiaojun pointed out in his speech: Vacuum technology innovation includes the latest application progress in the fields of vacuum equipment, vacuum application and engineering, vacuum film, vacuum metallurgical materials, vacuum electronics and display, vacuum preservation and food and medicine, vacuum semiconductors and vacuum parts. The conference combines the development of vacuum-related industrial technology, promotes the cooperation between vacuum technology industry, academia and research, promotes the integration of vacuum technology and related fields, and promotes social, economic and scientific and technological development. The convening of this conference can pool wisdom and make important contributions to the development of vacuum science and technology through the joint efforts of industry, academia and research.
Award Ceremony
The 5th Shanghai Vacuum Science and Technology Progress Award Ceremony was held at the meeting, and the 12 award-winning projects of the Vacuum Science and Technology Progress Award were awarded. These projects showcase the latest scientific and technological achievements made in Shanghai's vacuum field in the past two years, covering the research and development and industrialization of domestic vanadium oxide thin film deposition equipment, vacuum magnetron sputtering winding coating technology and application of ultra-soft thin films for spacecraft, research and development and industrialization of fully automatic high-vacuum dual-source evaporation thin film deposition equipment, high-capacity thick aluminum PVD sputtering machines, high-vacuum precision motion systems, etc., reflecting the application of vacuum science and technology innovation projects in major projects, and also highlighting the leading role of Shanghai's vacuum development.
Council of Directors
Then the 9th 4th Council was held. Secretary-General Mo Xiaoliang delivered a work report of the 9th Council with the theme of "Keeping Pace with the Times and Innovative Development" and the main work plan of the Society in 2025.
Chief Supervisor Yang Chunsheng delivered the "Work Report of the Ninth Supervisory Committee."
Vice President Han Jianhua made a report on the preparations for the change of term and an explanation of the adjustment of the "membership fee standards and management system".
Deputy Secretary-General Zhang Zhejuan made an "Explanation on the Amendment of the Society's Articles of Association. Chairman Sun Zhuo introduced the candidates for the 10th Council, Supervisors, Executive Council and Leadership Organization. The above reports were reviewed and approved by the Board of Directors.
Conference Report
There are a total of 19 conference reports in this forum.
Academician Sun Zhuo of Asia Pacific Academy of Materials Science gave a report on "Application of Nano-photoelectrocatalytic Materials in Environmental Purification".
Liu Jingquan, distinguished professor at Shanghai Jiao Tong University, gave a report on "Multi-dimensional MEMS brain-computer interface devices and systems".
Sun Jian, deputy general manager of the Operation Center of China Resources Microelectronics Co., Ltd., gave a report on "The Demand for Vacuum Equipment in Semiconductor Manufacturing".
Professor Hu Zhigao of the School of Physics and Electronic Science of East China Normal University gave four speeches including "A New Method for Direct Measurement of Flexoelectric Coefficients of Van der Waals Materials" Invited report.
Conference Report
On the second day, the first half of the report meeting was hosted by Professor Li Xifeng. Mo Xiaoliang, deputy dean of the Institute of Optoelectronics of Fudan University, gave a report on "Full vacuum process preparation of perovskite solar cells", Yu Qiang, general manager of Aifak Vacuum Technology (Suzhou) Co., Ltd., gave a report on "Aifak Group helps China's vacuum development", Lv Weijie, deputy director and researcher of the School of Materials and Composite Materials Research Institute of Shanghai Jiao Tong University, gave a report on "Design, preparation and application research of in-situ self-generated titanium-based composite materials", and Yu Qiang, general manager of Aifak Vacuum Technology (Suzhou) Co., Ltd., gave a report on "Aifak Group helps China's vacuum development", and Lv Weijie, deputy director and researcher of the School of Materials and Composite Materials Research Institute of Shanghai Jiao Tong University, gave a report on "Design, preparation and application research of in-situ self-generated titanium-based composite materials". Wuxi Shangji Semiconductor Technology Co., Ltd. Chairman Wang Shikuan wrote "The Application of Thermosensitive Material VOx Thin Film in MEMS Sensors and SJI-SEMI's process solutions" report, Shanghai Yinguan Semiconductor Technology Co., Ltd. Deputy General Manager Jiang Xuchu made a report on "Development and Application Research of Precision Motion Systems in (Ultra) High Vacuum Environments" and Beijing Tiandi Jingyi Technology Co., Ltd. General Manager Song Yanxia made a report on "Application and Prospect of -135 Degree Water Vapor Capture Pumps in Vacuum Coating Field".
The second half of the report was hosted by Professor Lv Weijie, and Researcher Jing Jiarong of Shanghai Yuda Industrial Co., Ltd. gave a report on "Mass Spectrometry Technology for Space Applications", Researcher Liu Weili from Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, gave a report on "Integrated Circuit Chip Flattening Technology", General Manager Sun Hongtao from Jiangsu Jinli Cold Chain Technology Co., Ltd. gave a report on "Research and Development and Industrialization of Fluid Vacuum Cooling Equipment Suitable for Automated Production", Professor Hou Xueling from Shanghai University gave a report on "Industrialization of High-Performance Getter Materials for Semiconductor Devices", Doctor Tang Hongming/Senior Engineer from Suzhou Bapima Superconducting Technology Co., Ltd. gave a report on "Research and Development of Semiconductor Cryogenic Pump System Based on Intelligent Networking Technology", and Professor Wang Xueling from Shanghai University gave a report on "Research and Development of Semiconductor Cryogenic Pump System Based on Intelligent Networking Technology". Liu Yiyong from Shanghai Advanced Research Institute of Chinese Academy of Sciences gave a report on "Application of Vacuum Technology in SHINE Project", Li Xifeng from Shanghai University gave a report on "Research on Materials and Devices of Double Active Layer Metal Oxide Thin Film Transistors", Mao Tianqing, Vice President of Sales of Changqiao Vacuum Technology (Zhejiang) Co., Ltd. gave a report on "Manufacturing and Market Prospects of Vacuum Chambers", and Lu Qishuai, general manager of Suzhou Hangyu Jiutian Power Technology Co., Ltd., gave a report on "Motors suitable for high-cleanliness and high-vacuum extreme environments". Experts and scholars from various fields of industry, academia and research brought wonderful reports to the conference. Participants actively asked questions and had in-depth exchanges and discussions on the content of the reports and research methods.
Concurrent Exhibition
In addition to the wonderful professional reports, the conference also attracted 26 well-known domestic and foreign companies to participate in the exhibition, such as Aifak, Changqiao Vacuum, Hangyu Jiutian, Chenhua Technology, Zhixinhang, Hunan Zhongyuan, Zhuojie Vacuum, Jiadelu, Shanghai Yinguan, Huifeng Petroleum, Ningbo Valve, Gonghua Special Oil, Feiyue Electromechanical, Beijing Techno, Hanzhong Precision Machinery, Tan's Vacuum, Pangu Automation, Shanghai Youzun, Fanfeng Vacuum, Huacheng Electronics, Laiku Semiconductor, Kunshan Xinlai, Century Jiutai, Jingwei Materials, Suzhou New World, Bokai Electromechanical, etc. They demonstrated their new technologies and equipment applied in the vacuum field on site.
Many companies promoted their products and technologies on site. The new technologies, new processes and new equipment displayed by the exhibitors aroused the interest of many participants. Representatives stopped to visit and negotiate, and the interactive exchanges at the exhibition area were lively.
This forum and annual meeting It is not only a grand meeting of academic exchange, but also a grand meeting of knowledge update and cooperation opportunities for vacuum technology. Focusing on the theme of the forum "Innovation and Development of Vacuum Technology", combined with the development of vacuum-related industrial technology, it promotes the integrated development of vacuum technology and related fields, promotes social economic and technological development, and provides a platform for communication and cooperation for vacuum industry units. The forum was a complete success and brought great benefits to the development of the industry. It has contributed to the construction of Shanghai's globally influential science and technology innovation center. It has contributed wisdom and strength to promote the technological progress and industrial upgrading of China's vacuum industry.
Current location: 
May. 28,2021 
