"High-precision wide-spectrum optical film thickness monitoring system" fills the domestic gap and reaches the international advanced level

         On the morning of December 7, 2024, the Guangdong Vacuum Society organized industry technical experts to evaluate the scientific and technological achievements "High-precision Wide-spectrum Optical Film Thickness Monitoring System" completed by Changchun University of Science and Technology Zhongshan Research Institute and other units at Zhongshan Overseas Students Entrepreneurship Park (New Park). The expert group carefully reviewed the evaluation materials provided by the units that completed the achievements, listened to the work report on the development of the achievements, and inspected the actual machine function display of the achievements on site. After questioning and discussion, they unanimously agreed that the achievement filled the domestic gap and reached the international advanced level.

        The high-precision wide-spectrum optical film thickness monitoring system is the core component of high-precision optical coating equipment, involving sensitive fields such as semiconductors, integrated circuits, infrared security, biomedical engineering, infrared military industry and aerospace. It is restricted by foreign imports and is a typical "bottleneck" technology.

        This achievement mainly develops a high-precision direct monitoring system for optical film thickness with a wide spectrum of visible and infrared. The system consists of a special light source, a spectral analysis device, a phase-locked amplifier, and a detection system. It directly monitors the optical thickness of the film through a filtering algorithm. This system is the control core of the optical precision coating equipment and directly determines the spectral accuracy of the thin film device. At present, only imported high-end equipment in China is equipped with a visible near-infrared light control system. Due to import restrictions, domestic equipment is not equipped with an infrared light control system, and the price of imported light control systems is very high. Wide-spectrum optical film thickness monitoring technology is still in its infancy in China, and the relevant equipment currently used in China is imported from abroad. In recent years, the demand for infrared optical films has exploded. The annual shipment of optical coating equipment in China is more than 300 sets, and more than 30% of the equipment needs high-end coating. This proportion is still growing. The stock of coating equipment is about 5,000+ sets. Nearly 30% of the equipment can improve the performance of the equipment by one level by adding a wide-spectrum optical film thickness monitoring system. Therefore, the results have good market application prospects and have achieved sales of more than ten sets.